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ISBN13: 9781937276065
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Advancing Silicon Carbide Electronics Technology II: Core Technologies of Silicon Carbide Device Processing AUTH-11426252 the Inkpot Award from theThe book presents an in depth review and analysis of Silicon Carbide device processing. The main topics are: (1) Silicon Carbide Discovery, Properties and Technology, (2) Processing and Application of Dielectrics in Silicon Carbide Devices, (3) Doping by Ion Implantation, (4) Plasma Etching and (5) Fabrication of Silicon Carbide Nanostructures and Related Devices. The book is also suited as supplementary textbook for graduate courses. Keywords:
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