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Axcelis Technologies 531061 E84 Interface Board Backplane PCB 531051 Used img{max-width:100%} Oriental Motor A4566-9215KPG 5-PhaseAxcelis Technologies 531061 E84 Interface Board Backplane PCB 531051 Used Inventory # A 8741 This Axcelis Technologies 531061 is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: 531061 Model No: E84 INTERFACE BOARD Rev. A 531051, Rev. A Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 20"x20"x20" @ 8 lbs. Only